Combinatorial Thin-Film Research Laboratory (CTRL) is dedicated to exploring advanced functional thin films applied in electronic industry using the state-of-the-art technique, combinatorial methodology.
Combinatorial methodology enables the generation of a much more comprehensive and uniform data set comparing with the traditional one-by-one-trial-and-error method, since it allows high throughput measurements on a “library” film that contains the entire compositional variation.
Key features of CTRL
(1) Combinatorial Synthesis of Thin Films
- microwave materials.
- magnetoelectric materials.
- wide band-gap semiconductors.
- high k dielectrics and metal gate.
- thin film solar cells
(2) High Throughput Deposition and Characterization of Thin Films
- magnetron sputtering system (DC, RF or reactive)
- composition spread
- discrete library
- scanning characterization tools: x-ray photoelectron spectroscopy (XPS), x-ray
microdiffractometer, semi-auto electrical probe, etc…
(3) Electronic device fabrication
- metal-oxide-semiconductor (MOS) and transistors.
- metal-insulator-metal (MIM) structures.
- solar cell structures.
ADDRESS: Department of Materials Science & Engineering, National Cheng Kung University,
No.1, University Road, Tainan City 70101, Taiwan